Small Chlorine Furnace | Compatible with MOCVD Fixtures and Quartz Boat Contaminant Removal
Volatile chlorination of GaN, AlN, and Si-based deposits with Cl2/HCl, and dry cleaning of the fixture.
In MOCVD and CVD processes, susceptors, quartz boats, quartz tubes, and fixtures may have reaction products containing GaN, AlN, Si-based materials, and metal components adhering to them. These deposits can be difficult to remove with chemical cleaning or mechanical methods, potentially leading to dimensional changes in the base material, surface roughness, damage, and increased cleaning costs. Our small chlorine furnace can convert these deposits into volatile chlorides through selective chlorination using Cl2/HCl, allowing for dry cleaning conditions while minimizing the impact on the base material. This small test furnace is suitable for cases where you want to reuse susceptors and quartz fixtures, reduce chemical cleaning, or extend the lifespan of fixtures. 【Features】 ■ Supports dry chlorination cleaning with Cl2/HCl ■ Allows for the consideration of removing GaN, AlN, Si-based deposits, and metal components ■ Addresses deposition films and reaction products that are difficult to remove with chemical cleaning ■ Enables the examination of conditions that minimize dimensional changes and surface roughness of the base material ■ Allows for comparison of temperature, gas concentration, and processing time with small fixtures *For more details, please download the materials or contact us.
- Company：サーモニックENG
- Price：Other
